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China to make 5nm chips with SAQP proces
A Beijing-based firm has reportedly started research of a multiple patterning process that can achieve the mass production of 5nm chips.
Naura Technology Group, a Shenzhen-listed company, last month began research on lithography systems that use a technique known as self-aligned quadruple patterning (SAQP), which can increase a chip’s density and performance, the South China Morning Post reported on Monday. The news that SiCarrier had been granted a SAQP-related patent had been released just a few days before Chinese President Xi Jinping met with Dutch Prime Minister Mark Rutte on March 27. A technology expert says in a social post that Intel used the SAQP technique to make chips but it ended up using more photomasks than usual to complete the metal layer due to extra cuttings.
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