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China touts home-grown chip lithography machines amid semiconductor self-sufficiency drive
Technology ministry claims ‘significant technological breakthroughs’ in deep-ultraviolet lithography by unnamed companies.
The Chinese government is promoting two domestically made chip-making machines that it says have achieved significant advances, as the country strives towards technology self-sufficiency amid US sanctions. One of the deep ultraviolet (DUV) lithography machines operates at a wavelength of 193 nanometres (nm), with a resolution below 65nm and an overlay accuracy below 8nm, according to a new list of “major technological equipment” published by the MIIT earlier this week. One of Dutch equipment maker ASML Holding’s most advanced DUV machines, for instance, can operate at a resolution of below 38nm with an overlay accuracy of 1.3nm.
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