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Russia completes development of 30-year-old outdated lithography tool

Now ready for mass production?

Zelenograd Nanotechnology Center (ZNTC) and Planar have concluded developing Russia's first lithography system capable of supporting 350nm-class process technologies (0.35 micron). The ZNTC lithography tool — which was officially introduced a year ago — is a 200-mm litho machine based on a solid-state laser with an exposure field size of 22mm × 22mm (484 mm^2). As such, the new scanner does not match the existing production nodes of major Russian foundries, limiting its immediate commercial relevance to non-critical layers at domestic producers, which will continue to use ASML's PAS 5500-series lithography tools, which are smuggled into Russia.

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